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先进纳米薄膜材料:制备方法及应用=Advanced Nano Deposition Methods:英文
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先进纳米薄膜材料:制备方法及应用=Advanced Nano Deposition Methods:英文
林媛 陈新主编
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List of Contributors
1 Pulsed Laser Deposition for Complex Oxide Thin Film and Nanostructure
1.1 Introduction
1.2 Pulsed Laser Deposition System Setup
1.3 Advantages and Disadvantages of Pulsed Laser Deposition
1.4 The Thermodynamics and Kinetics of Pulsed Laser Deposition
1.5 Monitoring of Growth Kinetics
1.6 Fundamental Parameters in Thin Film Growth
1.7 Pulsed Laser Deposition for Complex Oxide Thin Film Growth
1.8 Pulsed Laser Deposition for Nanostructure Growth
1.9 Variation of Pulsed Laser Deposition
1.10 Conclusion
2 Electron Beam Evaporation Deposition
2.1 Introduction
2.2 Electron Beam Evaporation System
2.3 Characterization of Thin Film
2.4 Summary
3 Nanostructures and Thin Films Deposited with Sputtering
3.1 Introduction
3.2 Nanostructures with Sputtering
3.3 Thin Films Deposited with Sputtering
3.4 Summary
4 Nanostructures and Quantum Dots Development with Molecular Beam Epitaxy
4.1 Introduction
4.2 Technology of MBE
4.3 Nanoheterostructures Fabricated by Molecular Beam Epitaxy
4.4 Quantum Dots Development with Molecular Beam Epitaxy
4.5 Summary
5 Carbon Nanomaterials and 2D Layered Materials Development with Chemical Vapor Deposition
5.1 Introduction
5.2 Carbon Nanotube Synthesis by Chemical Vapor Deposition
5.3 Graphene Synthesis by Chemical Vapor Deposition
5.4 Metal Dichalcogenide Synthesis by Chemical Vapor Deposition
5.5 Summary
6 Nanostructures Development with Atomic Layer Deposition
6.1 Introduction
6.2 Reaction Mechanisms
6.3 Nanostructures Based on ALD
6.4 Summary
7 Nanomaterial Development with Liquid-Phase Epitaxy
7.1 Introduction
7.2 Hydrothermal Method
7.3 Nanostructures Fabricated Using LPE
7.4 Summary
8 Nanostructural Thin Film Development with Chemical Solution Deposition
8.1 Introduction
8.2 Precursor Solution Preparation
8.3 Coating
8.4 Thermal Treatment
8.5 Control of the Microstructures in Thin Films Prepared by CSD Techniques
8.6 Examples of Nanostructural Thin Films Prepared by CSD Techniques
8.7 Summary
9 Nanomaterial Development Using In Situ Liquid Cell Transmission Electron Microscopy
9.1 Introduction
9.2 The Technological Development of In Situ Liquid Cell TEM
9.3 Nanomaterial Development Using In Situ Liquid Cell TEM Technology
9.4 Summary and Outlook
10 Direct-Writing Nanolithography
10.1 Introduction
10.2 Electron Beam Lithography
10.3 Focused Ion Beam Lithography
10.4 Gas-Assisted Electron and Ion Beam Lithography
10.5 SPM Lithography
10.6 Dip-Pen Lithography
10.7 Summary
11 3D Printing of Nanostructures
11.1 Introduction
11.2 3D Printing Processes
11.3 Types of 3D Printing
11.4 3D Direct Laser Writing by Multiphoton Polymerization
11.5 3D Printing Applications
11.6 Summary
12 Nanostructured Thin Film Solid Oxide Fuel Cells
12.1 Introduction
12.2 Solid Oxide Fuel Cells
12.3 Summary
13 Nanostructured Magnetic Thin Films and Coatings
13.1 Introduction
13.2 High-Frequency Devices
13.3 Magnetic Information Storage Devices
13.4 Summary
14 Phase Change Materials for Memory Application
14.1 Introduction
14.2 Ge2Sb2Te5 and Its Properties Improvement
14.3 High-Speed and Lower-Power TiSbTe Materials
14.4 Summary
15 Nanomaterials and Devices on Flexible Substrates
15.1 Introduction
15.2 Nanomaterials on Flexible Substrates
15.3 Devices on Flexible Substrates
15.4 Summary
Index
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